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Slot-Type Wet Process Eqpt.

Cassette-Less Washer

Cassette-less washer is a type of cleaning machine used in semi-conductor manufacturing.The core feature of the washing equi-pment is that cassette is removed from the traditional cleaning equip-ment, thus achieving significant improvement in efficien-cy, flexibility and cleanliness.

產(chǎn)品詳情

? The application scenarios are mainly concentrated in semiconductor manufacturing,MEMS.In the semiconduc-tor manufacturing process,it is widely used in the cleaning steps of key processes such as lithography and etching to ensure that the cleanliness of the wafer meets high requirements

? Compact structure, space-saving design for limited factory environment

? Fewer contact points in the wafer cleaning process to achieve high cleanliness and quality of the product

? Suitable for wafer processing of various sizes, different production needs can be meet.

? Advanced control systems and automation functions to achieve precise temperature,time and chemical soluti-on control, consistent and stable cleaning results can be ensured.


Applicable Process     Wafer Clean,Etch,PR Strip
Applicable Size     4/6/8/12 inch
Handing Method     Special tooling,Loadport

Process Indicators

     Surface Particles:≤300pcs/wafer          -@0.1-0.2μm Small Particle

表     面顆粒:≤5-10pcs/wafer                       @0.3μm Particle

     Metal Residue:≤5E10 atoms/cm2

Software Support     GEM/SECS interface,which provides functions such as EAP,MES etc.