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Slot-Type Wet Process Eqpt.

Fully-Auto Wet Cleaning Equipment

The fully automatic trough cleaning equipment owns multiple independent intellectual property rights and can be applied to RCA cleaning process, wet etching process,metal layer wet etc-hing process,furnace tube pre-cleaning process and other spe-cial process cleaning needs.The equipment adopts modular de-sign and is easy to maintain.

產(chǎn)品詳情

? Equipped with real-time monitoring of drug concentration and efficient recovery system, improving the utiliz-ation rate of drug solution

? It can be equipped with ultrasonic,megawave and tank flow field control technology to optimize cleaning ca-pability

? Flexible design,automatic scheduling of the system, multi-station concurrent processing,achieving efficient o-peration

? Software and hardware interlock safety device,automatic temperature calibration and over-temperature prot-ection to ensure the safety of personnel and machine

? It can be paired with functions such as one click acid change and Auto Pm to improve machine maintenance efficiency

? Multiple sets of robotic arm systems are transmitted to support the demand for "dry in, dry out" and improve cleanliness requirements


Applicable Process     Wafer Clean,Etch,PR Strip
Applicable Size     4/6/8/12 inch
Handing Method     Standard Cassette、Loadport

Process Indicators

     Surface Particles:≤300pcs/wafer          -@0.1-0.2μm Small Particle

表     面顆粒:≤5-10pcs/wafer                       @0.3μm Particle

     Metal Residue:≤5E10 atoms/cm2

Software Support     GEM/SECS interface,which provides functions such as EAP,MES etc.