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? Excellent cleaning effect: all-round cleaning without dead angles, and the special cleaning process and no-zzle design are used to make the cleaning liquid is evenly sprayed to all parts of the inside of the quartz bell jar.

? High-precision cleaning: High precision can be achieved for the microscopic particles and impurities that may be generated during epitaxial growth cleaning.

? Avoiding stress damage: There will be no excessive mechanical or thermal stress on the quartz bell during the cleaning process, preventing cracked or deformed bell jars due to stress concentrations.

? High degree of automation: intelligent operation process, equipped with advanced automatic controlling system, fully-auto cleaning process.

? Strong compatibility and versatility:different sizes are compatible,and epitaxial stones can be designed to adapt to different sizes and specifications of bell jar cleaning to meet a variety of production needs.

? Customized cleaning process: the cleaning scheme can be flexibly customized according to different clea-ning needs and process requirements.