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Auxiliary Eqpt.

In-Line Heater

The in-line heater is a highly efficient heating device designed f-or the semiconductor industry and is suitable for medium heati-ng scenarios that require precise temperature control.The heate-r is made of high quality quartz material with excellent corrosion resistance and thermal stability to operate in harsh industrial en-vironments.Its power range can be customized from 3 to 12KW to meet different process requirements. Through the circulation-in-line design, the heater enables fast and uniform medium hea-ting, ensuring high efficiency and consistency in the process.


產(chǎn)品詳情

ModelCGB-WH3CGB-WH6CGB-WH12
Power3KW6KW12KW
Heating Range25~85℃

Temperature

Control Accuracy

±1℃

    1.The change of the flow rate is ±10% (the temperature changes with the flow rate)

    2.The inlet water temperature of pure water changes in ±5%

    3.The power supply voltage fluctuation is 5% (rated voltage is 10%)

    4.The above thr ee situations cannot occur at the same time

Circulating Flow Range5~30L/min
Heater Time≤30min
Safety Features

    1.Overtemperature protection

    2.Dry burning protection

    3. Leakage overcurrent protection

    4. Low liquid level protection

    5. Leakage protection

Applicable

Chemical Class

    1. Applicable liquid types:Inorganic acids(HCl, H?SO?, HNO?, H?PO?), organic solvents

       (C?H?OH, C?H?O, C?H?), strong oxidizers(H?O?, O?, NaClO), ultrapure water(H?O), and

       low-concentration weak alkalis (NaOH, KOH) ; Prohibited: Hydrofluoric acid (HF, SiO? +

       4HF→SiF?↑+2H?O), high-temperature molten alkalis (NaOH/KOH).

    2. Applicable gas types:Suitable for inert gases(N?, Ar, He),oxidizing gases(O?, dry air), 

       reducing gases (H?, CO), common industrial gases (CO?, CH?, C?H?) , and dry & clean

       gases (e.g., high-purity N?), with specific protections required.