亚洲人成人无码网www国产,中国猛少妇色xxxxx,色135综合网,成人无码www免费视频在线看

Product

Home > Product> Single-Wafer Wet Process Eqpt.

Single-Wafer Wet Process Eqpt.

Fully-auto Monolithic Cleaning Machine

Fully-auto Monolithic Cleaning Machine adopts a multi-layer ca-vity structure, with a rotating brush head, two fluids, megasound and a variety of chemical liquids, which can effectively remove p-hysical particles and metal ion residues on the wafer, and is mai-nly used for the final cleaning of wafer manufacturing, post-CMP cleaning,pre-diffusion cleaning, post-etching cleaning, standard RCA, PR removal cleaning,pre- and post-coating cleaning, etc.

產(chǎn)品詳情

? Compatible with a wide range of wafer specs

? Self-cleaning brush head

? Achievable 4 cavity layers and the recovery of 3 kinds of chemical solutions

? Independent flipping module, automatic flipping and cleaning of both sides of the wafer

? On-line liquid dispensing function

? Flexible chambers( 2/4/6/8 ) configuring

? Excellent cleaning results

? A variety of safety tests(avoiding Debris producing)


Applicable Process     Wafer Clean,Etch,PR Strip
Applicable Size     4&6 inch,6&8 inch,8&12 inch
Loadport type     Open Cassette,FOUP,SMIF,EFEM
Chemicals     DIO3/SC1/SC2/DHF/HNO3/NMP/IPA
Particle     ≤30ea @0.2μm

Residue Of Metal Ions

     ≤1E10 atoms/cm2

Frangementation Rate     ≤0.1‰