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Marangoni Dryer is suitable for drying silicon carbide, polysili-con,and silicon-based wafers,supporting 4/6/8/12-inch wafers with optional thicknesses (350μm-1400μm), adapting to diver-

se application scenarios. Based on the Marangoni effect,it uses nitrogen to carry IPA to create a surface tension gradient for e-fficient drying, supporting three drying methods: wafer lifting, slow drainage, and swing. Equipped with an up/down convey-ing mechanism, it enables a cassetteless process,preventing p-

oor drying at the contact points between the cassette and wa-

fer, improving drying uniformity.